What is epitaxial deposition?
The term epitaxy comes from the Greek roots epi, meaning “above”, and taxis, meaning “in ordered manner”. Epitaxy refers to the deposition of an overlayer on a crystalline substrate, where the overlayer is in registry with the substrate. The overlayer is called an epitaxial film or epitaxial layer.
What do you mean by epitaxial growth of thin-film?
Epitaxy describes the oriented growth of a crystalline material on top of another. In a more specific term, it describes, predominately, the thin-film growth of a material on a substrate with a well-defined relationship.
How is epitaxial growth achieved?
4.5 Epitaxial Growth Epitaxial growth is broadly defined as the condensation of gas precursors to form a film on a substrate. Liquid precursors are also used, although the vapor phase from molecular beams is more in use. Vapor precursors are obtained by CVD and laser ablation.
What causes pseudomorphic epitaxial layer growth?
Epitaxial Tilting of GaN Grown on Vicinal Surfaces of Sapphire (Huang, et.al.) If the lattice mismatch is less than ~9%, the initial layers of film will grow pseudomorphically. Therefore very thin films strain elastically to have the same inter-atomic spacing as the substrate.
What are the types of epitaxial growth?
This chapter outlines the three major epitaxial growth processes used to produce layers of material for electronic, optical and optoelectronic applications. These are liquid-phase epitaxy (LPE), metalorganic chemical vapor deposition (MOCVD) and molecular beam epitaxy (MBE).
What is epitaxial grain growth?
Epitaxy refers to a type of crystal growth or material deposition in which new crystalline layers are formed with one or more well-defined orientations with respect to the crystalline seed layer. The deposited crystalline film is called an epitaxial film or epitaxial layer.
What is epitaxial growth of silicon?
Silicon Epitaxial Growth Process. In wafer fabrication, silicon epitaxial deposition, or epitaxy, refers to the process of growing a thin layer of single-crystal silicon over a single-crystal silicon substrate.
Why is epitaxy important?
The commercial importance of epitaxy comes mostly from its use in the growth of semiconductor materials for forming layers and quantum wells in electronic and photonic devices—for example, in computer, video display, and telecommunications applications.
Why is epitaxial growth important?
Why is epitaxial layer needed?
For the efficient emission or detection of photons, it is often necessary to constrain these processes to very thin semiconductor layers. These thin layers, grown atop bulk semiconductor wafers, are called epitaxial layers because their crystallinity matches that of the substrate even though…
What is epitaxial silicon transistor?
epitaxial transistor in British English (ˌɛpɪˈtæksɪəl ) a transistor made by depositing a thin pure layer of semiconductor material (epitaxial layer) onto a crystalline support by epitaxy. The layer acts as one of the electrode regions, usually the collector.